Finite element modeling and modal analysis of micromechanical gyroscope sensitive element

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NE = 3328 NDF = 88416

3D FE model

Finite element modeling and

NE = 3328 NDF = 88416 3D FE model Finite element modeling
modal analysis of micromechanical gyroscope sensitive element

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F1

F2

First natural mode

Second natural mode

Finite element modeling and modal analysis of micromechanical

F1 F2 First natural mode Second natural mode Finite element modeling and
gyroscope sensitive element

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Ux

Displacements Ux

Finite element modeling and modal analysis of micromechanical gyroscope sensitive element

Ux Displacements Ux Finite element modeling and modal analysis of micromechanical gyroscope sensitive element

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Uy

Displacements Uy

Finite element modeling and modal analysis of micromechanical gyroscope sensitive element

Uy Displacements Uy Finite element modeling and modal analysis of micromechanical gyroscope sensitive element

Слайд 6

Uz

Displacements Uz

Finite element modeling and modal analysis of micromechanical gyroscope sensitive element

Uz Displacements Uz Finite element modeling and modal analysis of micromechanical gyroscope sensitive element
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