Слайд 2NE = 3328 NDF = 88416
3D FE model
Finite element modeling and

modal analysis of micromechanical gyroscope sensitive element
Слайд 3F1
F2
First natural mode
Second natural mode
Finite element modeling and modal analysis of micromechanical

gyroscope sensitive element
Слайд 4Ux
Displacements Ux
Finite element modeling and modal analysis of micromechanical gyroscope sensitive element

Слайд 5Uy
Displacements Uy
Finite element modeling and modal analysis of micromechanical gyroscope sensitive element

Слайд 6Uz
Displacements Uz
Finite element modeling and modal analysis of micromechanical gyroscope sensitive element
